Title:
【発明の名称】回転式基板処理装置用の基板回転保持装置
Document Type and Number:
Japanese Patent JP2855046
Kind Code:
B2
Abstract:
A plurality of substrate holding members and a substrate pressing member are disposed on a rotation stage at a peripheral portion. The substrate pressing member includes a magnet and is pivotally supported by the rotation stage. A ring-shaped permanent magnet is located below the rotation stage and forms a ring around the rotation axis of the rotation stage. When a substrate mounted on the rotation stage is rotated and processed, the ring-shaped permanent magnet is positioned in the vicinity of the magnet of the substrate pressing member. This creates a magnetic force between the magnets, causing the substrate pressing member to pivot so that the substrate pressing member contacts the edge of the substrate with a predetermined amount of pressure.
Inventors:
YOSHIOKA KATSUJI
NAKAGAWA KOJI
ITABANE MASAYUKI
HIRAOKA NOBUYASU
TAKEOKA MASASHI
NAKAGAWA KOJI
ITABANE MASAYUKI
HIRAOKA NOBUYASU
TAKEOKA MASASHI
Application Number:
JP9875293A
Publication Date:
February 10, 1999
Filing Date:
March 31, 1993
Export Citation:
Assignee:
DAINIPPON SUKURIIN SEIZO KK
International Classes:
B05B13/02; B05C11/08; G11B7/26; H01L21/027; H01L21/30; H01L21/304; H01L21/306; H01L21/683; H01L21/687; (IPC1-7): H01L21/027; B05B13/02; G11B7/26; H01L21/304; H01L21/306; H01L21/68
Domestic Patent References:
| JP459155A | ||||
| JP2278713A | ||||
| JP2209731A |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)