Title:
【発明の名称】研磨装置における研磨皿の揺動装置
Document Type and Number:
Japanese Patent JP2594694
Kind Code:
B2
More Like This:
Inventors:
Youichi Kasuga
Application Number:
JP24911190A
Publication Date:
March 26, 1997
Filing Date:
September 19, 1990
Export Citation:
Assignee:
Haruka Precision Co., Ltd.
International Classes:
B24B13/00; B24B13/01; B24B13/02; (IPC1-7): B24B13/01; B24B13/00; B24B13/02
Domestic Patent References:
| JP1188259A | ||||
| JP1109062A | ||||
| JP6052246A |
Attorney, Agent or Firm:
Karaki Joji