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Title:
【発明の名称】水分解剤、それを使用した材料表面吸着水分解除去方法、気体中水分分解除去方法及びそれらの装置
Document Type and Number:
Japanese Patent JP2818054
Kind Code:
B2
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Inventors:
Katsuyoshi Tatenuma
Application Number:
JP17729991A
Publication Date:
October 30, 1998
Filing Date:
June 22, 1991
Export Citation:
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Assignee:
Katsuyoshi Tatenuma
International Classes:
B08B3/08; C01B7/01; C09K3/18; H01L21/304; (IPC1-7): C09K3/18; B08B3/08; C01B7/01; C09K3/18; H01L21/304
Domestic Patent References:
JP4818227A
JP2115292A
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)



 
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