Title:
表面積が増大したＩＲセンサー
Document Type and Number:
Japanese Patent JP6487335
Kind Code:
B2
Inventors:
Thomas W. Smith
Application Number:
JP2015550426A
Publication Date:
March 20, 2019
Filing Date:
December 09, 2013
Export Citation:
Assignee:
Illinois Tours Works Inc.
International Classes:
G01J1/02; G01J1/42; G01V8/20; H01L31/0264; H01L37/02
Domestic Patent References:
| JP58079122A | ||||
| JP2012112727A | ||||
| JP6120570A | ||||
| JP11248540A | ||||
| JP2011027645A | ||||
| JP9297057A | ||||
| JP3123885A | ||||
| JP2171621A | ||||
| JP59189619A |
Foreign References:
| WO2010134255A1 | ||||
| US4491727 |
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Yasushi Ohashi
Koichi Ito
Takuya Shinoda
Tetsuro Shimada
Shinji Mitsuhashi
Yasushi Ohashi
Koichi Ito
Takuya Shinoda