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Title:
IC FORMING MACHINE
Document Type and Number:
Japanese Patent JPS5837999
Kind Code:
A
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Inventors:
HINO TOSHIKATSU
HODOTSUKA MASAO
Application Number:
JP13669781A
Publication Date:
March 05, 1983
Filing Date:
August 31, 1981
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H05K13/02; H01L23/32; H05K3/30; H05K13/00; (IPC1-7): H01L23/32; H05K3/30; H05K13/00
Domestic Patent References:
JPS5531744A1980-03-06
Attorney, Agent or Firm:
Koshiro Matsuoka



 
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