Title:
IC HANDLER AND ITS CONTROL METHOD
Document Type and Number:
Japanese Patent JP3155890
Kind Code:
B2
Abstract:
PURPOSE: To control the temperature of an IC being tested directly and with good accuracy by installing a temperature control device which controls the temperature of a socket part and which can be moved.
CONSTITUTION: A conveyance device 6 grips an IC 11 at the terminal end of a guide rail 4 by means of a conveyance head 10, and it moves the IC to a socket 7 so as to be mounted on the socket 7. Then, the conveyance device 6 is returned to its original position. Then, an opening and shutting device 5 is moved to the position of the socket 7, it closes a lid 13 for the socket 7, and the opening and shutting device 5 is returned to its original position. Then, a temperature control device 1 is lowered so as to cover the socket 7 as a whole, it performs a temperature control operation, and it tests the IC 11 after a prescribed time has elapsed. After a temperature test has been finished, the temperature control device 1 is raised, the opening and shutting device 5 is moved, it opens the lid 13 for the socket 7, and it is returned to its original position. Then, the conveyance device 6 is moved, the IC is gripped by the conveyance head 10, and it is conveyed to a guide rail 8 for discharge so as to be returned to its original position. The IC 11 is housed in an unloader 9 through the rail 8.
More Like This:
| JP6164623 | An electronic-parts moving system and an electronic-parts conveying machine |
| JPS62213529 | DRIVING DEVICE |
| JP2011238836 | SUBSTRATE PROCESSING APPARATUS |
Inventors:
Hiroyuki Seya
Kiyomichi Ikenaga
Satoshi Chiba
Masatoshi Magara
Murakami Itsuro
Kiyomichi Ikenaga
Satoshi Chiba
Masatoshi Magara
Murakami Itsuro
Application Number:
JP18267694A
Publication Date:
April 16, 2001
Filing Date:
August 04, 1994
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/677; H01L21/68; G01R31/26; (IPC1-7): G01R31/26; H01L21/68
Domestic Patent References:
| JP6035278A | ||||
| JP5249179A | ||||
| JP514951U |
Attorney, Agent or Firm:
Katsuo Ogawa (2 outside)