To provide an IC-integrated acceleration sensor, which can be reduced in overall size and height, and can be easily manufactured.
This sensor comprises an acceleration sensor 2, an IC chip 3, a housing 6 of a storing means and a cover 7, and the acceleration sensor 2 comprises an acceleration sensor terminal 2d provided on a beam supporting side face 2e of a support body 2c and the IC chip 3 comprises a processing circuit forming face 3a where a processing circuit and an IC chip element 3b are formed. The IC chip 3 and the acceleration sensor 2 are arranged so that the beam support side face 2e and the processing circuit forming face 3a are positioned in the opposite direction with a fixed distance apart and are fixed by a conductive means 4 of a gold bump 41 and an electric conductive resin 42 set between the acceleration sensor terminal 2d and the IC chip terminal 3b.
Tatsuya Masuda
Next Patent: QUANTIFICATION METHOD OF CORTICOSTEROID