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Patent Searching and Data


Title:
IC-INTEGRATED ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP2008026183
Kind Code:
A
Abstract:

To provide an IC-integrated acceleration sensor, which can be reduced in overall size and height, and can be easily manufactured.

This sensor comprises an acceleration sensor 2, an IC chip 3, a housing 6 of a storing means and a cover 7, and the acceleration sensor 2 comprises an acceleration sensor terminal 2d provided on a beam supporting side face 2e of a support body 2c and the IC chip 3 comprises a processing circuit forming face 3a where a processing circuit and an IC chip element 3b are formed. The IC chip 3 and the acceleration sensor 2 are arranged so that the beam support side face 2e and the processing circuit forming face 3a are positioned in the opposite direction with a fixed distance apart and are fixed by a conductive means 4 of a gold bump 41 and an electric conductive resin 42 set between the acceleration sensor terminal 2d and the IC chip terminal 3b.


Inventors:
SUZUKI TOMOYUKI
Application Number:
JP2006199883A
Publication Date:
February 07, 2008
Filing Date:
July 21, 2006
Export Citation:
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Assignee:
MITSUMI ELECTRIC CO LTD
International Classes:
G01P15/08; G01P15/12; H01L23/02; H01L23/08; H01L29/84
Attorney, Agent or Firm:
Kazuo Asahi
Tatsuya Masuda