Title:
ILLUMINANCE CORRECTING PLATE FOR EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JPS61150330
Kind Code:
A
Abstract:
PURPOSE:To provide positively or negatively correlated density distribution on the main surface of a target substrate and to eliminate the inherent irregularity in illuminance on that surface when no correcting plate is present on the main surface of a light-transmitting substrate, by disposing the light-transmitting substrate which is selectively provided with light-shielding sections, in the light path between a light source and the target substrate. CONSTITUTION:Ultraviolet or far ultraviolet radiations produced by a light-source lamp 1 are reflected by a light-collecting mirror 2 coated with MgF2. Infrared rays and visual light rays are transmitted by a cold mirror 3 and the rays within the ultraviolet region are applied to an integrator 4 which is a plate carrying a set of convex lenses. The ultraviolet rays parallelized by the integrator 4 are reflected by a collimator lens 5 and applied to a reflection mirror 6. The parallel rays reflected by the mirror 6 are applied through an illuminance correcting plate 9 to a negative plate 7, and further applied to a target material substrate 8 coated with photoresist. The correcting plate 9 has a light-transmitting glass substrate 91, which is selectively provided with a chrome film 92 so as to provide positively or negatively correlated density distribution on the main surface of the substrate 8. Consequently, the irregularity in illuminance that the substrate 8 inherently has can be eliminated.
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Inventors:
YONEYAMA RYOICHI
Application Number:
JP27195184A
Publication Date:
July 09, 1986
Filing Date:
December 25, 1984
Export Citation:
Assignee:
HOYA CORP
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G03F7/20
Attorney, Agent or Firm:
Masaki Yamakawa