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Title:
ILLUMINATING OPTICAL DEVICE, DRAWING OPTICAL DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2008270571
Kind Code:
A
Abstract:

To provide an illuminating optical device having a high degree of freedom with respect to a device layout.

In the illuminating optical device for leading beams emitted from a light source to an illumination target, the illuminating optical device has: an enlarged image forming optical system disposed between the light source and the illumination target; and a reduction optical system disposed between the enlarged image forming optical system and the illumination target. The enlarged image forming optical system is constituted so as to form an image face between the light source and the illumination target, and has a larger magnification than unit magnification. The reduction optical system has a magnification which is less than unit magnification.


Inventors:
SUDA HIROMI
Application Number:
JP2007112299A
Publication Date:
November 06, 2008
Filing Date:
April 20, 2007
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
JPS6380243A1988-04-11
JPH096009A1997-01-10
JPH0933852A1997-02-07
JPH10153866A1998-06-09
JPH1187236A1999-03-30
JP2005150542A2005-06-09
JP2005203760A2005-07-28
JP2007085876A2007-04-05
JP2005150541A2005-06-09
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura



 
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