Title:
ILLUMINATING OPTICAL DEVICE
Document Type and Number:
Japanese Patent JPH0248627
Kind Code:
A
Abstract:
PURPOSE:To obtain a substantial surface light source by providing a fly-eye type integrator where positive or negative lenses are arranged in parallel by putting a relay lens between them and a prismatic internal reflection type integrator. CONSTITUTION:The image of a condensing point group formed by the fly-eye type integrator 10 is formed near the incident plane of the internal reflection type integrator 20, so that the lens can be prevented from being destroyed by heat at the time of condensing. The image S0 of a light source near the incident plane 20a of the square pole-like integrator 20 passes through an exit plane 20b. The luminous flux reflected on a side surface 20c is projected as if it is from a virtual condensing point S1 which is conjugated with the S0. Thus, the divergent luminous flux from the point S0 is reflected on the wall surface and projected as if the light beams are supplied from many light source images in substance. Then, the exit surface 20b is irradiated with the luminous flux from many condensing points distributed in a grid pattern and the substantial surface light source is formed on a surface S.
Inventors:
KUDO YUJI
Application Number:
JP20092288A
Publication Date:
February 19, 1990
Filing Date:
August 11, 1988
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B19/00; G03B27/32; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G02B19/00; G03B27/32; H01L21/027
Domestic Patent References:
| JPH01152411A | 1989-06-14 |
Attorney, Agent or Firm:
Takao Watanabe
Next Patent: ENDOSCOPIC DEVICE