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Patent Searching and Data


Title:
ILLUMINATING OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JPH07134247
Kind Code:
A
Abstract:

PURPOSE: To illuminate region to be illuminated with high luminous efficiency and illuminance without making the electric power of a light source larger even if a narrow illuminated region and a small illuminating numerical aperture are given as the specification.

CONSTITUTION: Light from a mercury lamp 1 is reflected/converged by the rotary ellipsoid of a converging mirror 2 and the image of the real image of the light emitting part of the mercury lamp 1 is formed on an image forming point 22A with the light converged by a correcting optical system 9. The light from the real image is converted into a roughly parallel luminous flux by a collimater lens 3 and supplied to a fly eye lens 5 and the illuminated region 8 is illuminated with the light from a large number of source images on the light exit surface of the fly eye lens 5 via a condenser lens 7.


Inventors:
MORI KOJI
Application Number:
JP28078993A
Publication Date:
May 23, 1995
Filing Date:
November 10, 1993
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B19/00; G03F7/20; (IPC1-7): G02B19/00
Attorney, Agent or Firm:
Satoshi Omori