Title:
ILLUMINATING OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
Document Type and Number:
Japanese Patent JP2015038975
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical technique that targets on illumination intensity over an illumination field and can exert influence in an illuminating angle-dependent mode.SOLUTION: An illuminating optical unit comprises raster arrangements 12 and 16 for presetting the shape of an illumination field 3, a transmitting optical unit 17 for superposed transmission of an illuminating beam 8 toward the illumination field 3 and an illuminating angle changing device 14. The illuminating angle changing device 14 has at least one displaceable illumination angle changing unit 14b for deflecting the illuminating beam 8 at different deflection angles and generating deflection angles for the illuminating beam 8. The displaceable illumination angle changing unit 14b is displaceable relative to the raster arrangements 12 and 16 so as to influence the magnitude of a second deflection angle generated by the displaceable illumination angle changing unit 14b on a deflection plane xz perpendicular to an object displacing direction y.
Inventors:
AXEL SCHOLZ
MICHAEL PATRA
FRANK SCHLESENER
MAUL MANFRED
WOLFGANG EMER
STEFANIE HILT
MICHAEL PATRA
FRANK SCHLESENER
MAUL MANFRED
WOLFGANG EMER
STEFANIE HILT
Application Number:
JP2014142010A
Publication Date:
February 26, 2015
Filing Date:
July 10, 2014
Export Citation:
Assignee:
ZEISS CARL SMT GMBH
International Classes:
H01L21/027; G02B3/00; G02B5/08; G02B19/00; G03F7/20
Domestic Patent References:
| JP2014146718A | 2014-08-14 | |||
| JP2009516367A | 2009-04-16 | |||
| JP2008124308A | 2008-05-29 | |||
| JPH09180993A | 1997-07-11 | |||
| JPH11274060A | 1999-10-08 |
Attorney, Agent or Firm:
辻居 Koichi
Sadao Kumakura
Fumiaki Otsuka
Takayoshi Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuyuki Taniguchi
Sadao Kumakura
Fumiaki Otsuka
Takayoshi Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuyuki Taniguchi