Title:
ILLUMINATION APPARATUS FOR EXPOSURE
Document Type and Number:
Japanese Patent JPH05217855
Kind Code:
A
Abstract:
PURPOSE: To maintain the uniformity of illuminance even when the σ value is changed substantially.
CONSTITUTION: An optical integrator 2 and a second optical integrator 12 are provided in a way that they are interchangeable with each other. The second optical integrator 12 is constituted as follows. The number of secondary light sources thereof is almost the same as that of the optical integrator 2; the plane light source composed of the secondary light sources of the former is different in size from that of the latter; and the number of apertures on the exit side of the former is the same as that of the latter.
Inventors:
MORI KOJI
Application Number:
JP4614092A
Publication Date:
August 27, 1993
Filing Date:
February 01, 1992
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B19/00; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G03B27/32; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Satoshi Omori