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Title:
ILLUMINATION DEVICE, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2003090978
Kind Code:
A
Abstract:

To provide an illumination device, an exposure device and a method for manufacturing a device by which changes in the illuminance on the illuminated face or degradation in the control of the exposure light quantity can be prevented in the exposure device using a light source at ≤180 nm wavelength.

The illumination device uses an oscillation laser as a light source to illuminate a specified illumination region with a luminus flux at ≤180 nm wavelength and is equipped with an optical member made of a magnesium fluoride crystal which generates a different polarization state of the beam with respect to the plane perpendicular to the optical axis.


Inventors:
SHIOZAWA TAKANAGA
Application Number:
JP2001281991A
Publication Date:
March 28, 2003
Filing Date:
September 17, 2001
Export Citation:
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Assignee:
CANON KK
International Classes:
G02B5/30; G02B1/02; G02B3/00; G02B19/00; G02B27/00; G03F7/20; H01L21/027; H01S3/00; (IPC1-7): G02B27/00; G02B1/02; G02B3/00; G02B5/30; G02B19/00; G03F7/20; H01L21/027; H01S3/00
Attorney, Agent or Firm:
Ryosuke Fujimoto