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Title:
ILLUMINATION DEVICE, PROJECTION DEVICE, SCANNER, AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2014126836
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination device capable of minimizing loss of diffracted light and accurately identifying presence of change in characteristics of a diffraction optical element using a simple configuration.SOLUTION: An illumination device 10 includes; a light source 11; a diffraction optical element 12 having a first element 121 and a second element 122, of which the first element diffracts light emitted from the light source to illuminate an illuminating target area with diffracted light L11 and the second element diffracts the light emitted from the light source in a different direction from a diffraction direction of the first element; a first photodetector 13 which detects at least a portion of regular reflection light L12 reflected from an incident surface of the diffraction optical element; a second photodetector 14 which detects at least a portion of diffracted light L13 generated by the second element of the diffraction optical element; and a determination unit 15 which computes a relative value from a first detection value detected by the first photodetector and a second detection value detected by the second photodetector and determines whether characteristic of the diffraction optical element has changed or not based on changes in the relative value and the first detection value.

Inventors:
ISHIDA KAZUTOSHI
Application Number:
JP2012285848A
Publication Date:
July 07, 2014
Filing Date:
December 27, 2012
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
G02B5/18; F21S2/00; F21V23/00; G02B5/32; G02B19/00; G03F7/20; H01L21/027
Domestic Patent References:
JP2012032379A2012-02-16
JP2003084114A2003-03-19
JP2008077741A2008-04-03
JPH11320968A1999-11-24
JPH0684762A1994-03-25
JP2011196907A2011-10-06
JP2008300106A2008-12-11
JP2012123061A2012-06-28
JPH09305692A1997-11-28
JPH0283519A1990-03-23
JP2005107338A2005-04-21
JP2009272347A2009-11-19
JPH1115380A1999-01-22
Foreign References:
US4687282A1987-08-18
Attorney, Agent or Firm:
Hirohito Katsunuma
Hiroyuki Nagai
Katsuomi Isogai
Yukihiro Hotta
Katsumi Ozawa



 
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