Title:
照明光学ユニット
Document Type and Number:
Japanese Patent JP2014516209
Kind Code:
A
Abstract:
An illumination optical unit for an EUV projection exposure apparatus has a diaphragm comprising a radiation-transmissive region having a discrete symmetry group. The form of the diaphragm is adapted to the form of the facets of a pupil facet mirror or to the form of the radiation source. The diaphragm is preferably arranged in the region of an intermediate focal plane.
More Like This:
Inventors:
Entres Martin
Application Number:
JP2014511820A
Publication Date:
July 07, 2014
Filing Date:
May 16, 2012
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B19/00
Domestic Patent References:
JP2011512659A | 2011-04-21 | |||
JP2001338868A | 2001-12-07 | |||
JP2011503869A | 2011-01-27 | |||
JP2009512223A | 2009-03-19 | |||
JP2010502004A | 2010-01-21 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi