Title:
ILLUMINATION OPTICAL APPARATUS, ALIGNER, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2011077142
Kind Code:
A
Abstract:
To provide an illumination optical apparatus for suppressing a loss of a quantity of illumination light caused by a change in an illumination condition, and to provide an aligner and a device manufacturing method.
The illumination optical apparatus 3 includes a second reflection type integrator 23 including an element group 230A generating a first illumination condition and an element group 230B generating a second illumination condition different from the first illumination condition; and an irradiation device 40 which irradiates one of the element group 230A and the element group 230B selectively with exposure light EL.
Inventors:
OSHINO TETSUYA
KAWABE YOSHIO
KAWABE YOSHIO
Application Number:
JP2009224710A
Publication Date:
April 14, 2011
Filing Date:
September 29, 2009
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2006216917A | 2006-08-17 | |||
| JP2005337889A | 2005-12-08 | |||
| JP2002353105A | 2002-12-06 | |||
| JP2008258605A | 2008-10-23 | |||
| JP2008135743A | 2008-06-12 | |||
| JP2006253487A | 2006-09-21 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi
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