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Title:
ILLUMINATION OPTICAL APPARATUS, AND PROJECTION EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP2010192914
Kind Code:
A
Abstract:

To provide an illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with illumination light in a predetermined polarized state.

Am illumination optical system (ILS) for illuminating a reticle (R) with illumination light (IL) and a projection optical system for projecting a pattern image of the reticle (R) onto a wafer (W) are provided. Illumination light (IL) emitted from an exposure light source (1) in a linearly polarized state in the illumination optical system (ILS) passes through first and second birefringent members (12, 13) having different fast axis directions and is converted into a polarized state that is substantially linearly polarized in a circumferential direction with the optical axis as the center in an almost specific annular area, and then illuminates the reticle (R) under an annular illuminating condition after passing through a fly-eye lens (14).


Inventors:
SHIRAISHI NAOMASA
Application Number:
JP2010087010A
Publication Date:
September 02, 2010
Filing Date:
April 05, 2010
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
JPH09184918A1997-07-15
JP2003035822A2003-02-07
JPH05283317A1993-10-29
JP2001274083A2001-10-05
JP2000114157A2000-04-21
JP2002520810A2002-07-09
JPH07183201A1995-07-21
JP2002289505A2002-10-04
JP2002231619A2002-08-16
JPH09184918A1997-07-15
JP2003035822A2003-02-07
JPH05283317A1993-10-29
JP2001274083A2001-10-05
JP2000114157A2000-04-21
JP2002520810A2002-07-09
JPH07183201A1995-07-21
JP2002289505A2002-10-04
JP2002231619A2002-08-16
JP2004103746A2004-04-02
Foreign References:
WO2000067303A12000-11-09
WO2003003429A12003-01-09
WO2003003429A12003-01-09
WO2000067303A12000-11-09
WO2001035451A12001-05-17
WO2001023935A12001-04-05
WO2005005694A12005-01-20
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki