Title:
ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2015073129
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical device, an exposure device, and a device manufacturing method that are capable of contributing to an improvement of device manufacturing efficiency through an increase of output of a light source even when a spatial light modulation member is disposed in an optical path of light emitted from the light source.SOLUTION: An exposure device 11 includes an illumination optical device 13 that guides exposure light EL emitted from an exposure light source 12 to a reticle R. The illumination optical device 13 includes a plurality of movable multi-mirrors 22 arranged in an array form, with each movable multi-mirror 22 being constructed by arranging a plurality of element mirrors having movable reflection surfaces in an array form. Also, every movable multi-mirror 22 is disposed in an optical path of the exposure light EL emitted from the exposure light source 12.
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Inventors:
HIROTA HIROYUKI
Application Number:
JP2014255739A
Publication Date:
April 16, 2015
Filing Date:
December 18, 2014
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JPH09133862A | 1997-05-20 | |||
| JPH113849A | 1999-01-06 | |||
| JP2006086529A | 2006-03-30 | |||
| JP2009290220A | 2009-12-10 | |||
| JP2009008997A | 2009-01-15 | |||
| JP2004006440A | 2004-01-08 | |||
| JP2002353105A | 2002-12-06 | |||
| JP2006171426A | 2006-06-29 | |||
| JPH09133862A | 1997-05-20 | |||
| JPH113849A | 1999-01-06 | |||
| JP2006086529A | 2006-03-30 | |||
| JP2009290220A | 2009-12-10 | |||
| JP2009008997A | 2009-01-15 | |||
| JP2004006440A | 2004-01-08 |
Foreign References:
| WO2006085626A1 | 2006-08-17 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani