To provide an illumination optical device which can achieve appropriate lighting conditions required for transferring a mask pattern having various characteristics faithfully, e.g. diverse lighting conditions for the light intensity distribution or the polarization state of a secondary light source.
An illumination optical device comprises illumination pupil formation means 3, 4, 7, 8 for forming, on a pupil surface of the illumination optical device or the vicinity thereof, an illumination pupil distribution having a light intensity distribution located in a center region including an optical axis (AX) and a light intensity distribution located in a plurality of peripheral regions spaced apart from the optical axis, and region change means 6 (6a, 6b) for changing the location and the magnitude of the light intensity distribution located in a plurality of the peripheral regions independently from the light intensity distribution located in the center region.
NISHINAGA HISASHI
KUDO TAKETO
JP2006332355A | 2006-12-07 | |||
JP2005167254A | 2005-06-23 | |||
JP2000058441A | 2000-02-25 | |||
JPH0590128A | 1993-04-09 | |||
JPH06118623A | 1994-04-28 | |||
JPH05226225A | 1993-09-03 | |||
JPH11204432A | 1999-07-30 | |||
JPH07318847A | 1995-12-08 | |||
JP2002231619A | 2002-08-16 | |||
JP2003234285A | 2003-08-22 | |||
JPH07183201A | 1995-07-21 | |||
JP2003297727A | 2003-10-17 | |||
JP2002231619A | 2002-08-16 | |||
JP2003234285A | 2003-08-22 | |||
JPH0653120A | 1994-02-25 | |||
JPH07183201A | 1995-07-21 | |||
JP2000058441A | 2000-02-25 | |||
JP2006332355A | 2006-12-07 | |||
JP2005167254A | 2005-06-23 | |||
JPH0590128A | 1993-04-09 | |||
JPH06118623A | 1994-04-28 | |||
JPH05226225A | 1993-09-03 | |||
JPH11204432A | 1999-07-30 | |||
JPH07318847A | 1995-12-08 |
Yoshiki Kuroki
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