Title:
ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2016021526
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical device for forming the shape of the image of a secondary light source into a desired ring shape or a circular shape, while suppressing the loss of a light quantity.SOLUTION: An illumination optical device 100 includes a first optical element 71 which is installed in the condensing position of a condensing part 2 or a position for maintaining the condensing position and reflects a part of an incident luminous flux, a second optical element 81 which is installed in a pupil position with respect to the condensing position of the condensing part 2 and reflects a part of the incident luminous flux, a Fourier transformation optical system 5 which is arranged on an optical axis between the condensing position and the pupil position, and an optical integrator 6 which emits a luminous flux made incident through the Fourier transformation optical system 5 toward an irradiated object R. A part of the luminous flux made incident on the optical integrator 6 is reflected by the second optical element 81, to pass through the Fourier transformation optical system 5, then, made incident on the first optical element 71, reflected by the first optical element 71, to pass through the Fourier transformation optical system 5, and then, made incident on the optical integrator 6.SELECTED DRAWING: Figure 1
Inventors:
KAWASHIMA HARUNA
Application Number:
JP2014145243A
Publication Date:
February 04, 2016
Filing Date:
July 15, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Ryoichi Takaoka
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