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Title:
ILLUMINATION OPTICAL DEVICE, METHOD OF ADJUSTING ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2011187989
Kind Code:
A
Abstract:

To provide an illumination optical device, which almost uniformly adjusts the pupil luminance distribution at each point on irradiated surface respectively while the illumination distribution on the irradiated surface is almost uniformly kept or adjusted.

The illumination optical device illuminates the irradiated surface with a luminous flux from a light source. A pupil luminance distribution forming means for forming a pupil luminous distribution having a predetermined luminous distribution on an illuminated pupil surface, and an adjustment means for independently adjusting a pupil luminous distribution concerning each points on the irradiated surface points are provided. The adjustment means includes a plurality of adjustment film disposed in an optical path between the means for forming a pupil distribution and the irradiated surface and having a predetermined transmittance distribution or a reflectance distribution.


Inventors:
TANAKA HIROHISA
SHIGEMATSU KOJI
Application Number:
JP2011130751A
Publication Date:
September 22, 2011
Filing Date:
June 11, 2011
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00
Domestic Patent References:
JPH0365623A1991-03-20
JPH0766121A1995-03-10
JP2003092253A2003-03-28
Foreign References:
WO2002031570A12002-04-18
Attorney, Agent or Firm:
Takao Yamaguchi