To provide an illumination optical device, which almost uniformly adjusts the pupil luminance distribution at each point on irradiated surface respectively while the illumination distribution on the irradiated surface is almost uniformly kept or adjusted.
The illumination optical device illuminates the irradiated surface with a luminous flux from a light source. A pupil luminance distribution forming means for forming a pupil luminous distribution having a predetermined luminous distribution on an illuminated pupil surface, and an adjustment means for independently adjusting a pupil luminous distribution concerning each points on the irradiated surface points are provided. The adjustment means includes a plurality of adjustment film disposed in an optical path between the means for forming a pupil distribution and the irradiated surface and having a predetermined transmittance distribution or a reflectance distribution.
SHIGEMATSU KOJI
JPH0365623A | 1991-03-20 | |||
JPH0766121A | 1995-03-10 | |||
JP2003092253A | 2003-03-28 |
WO2002031570A1 | 2002-04-18 |
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