To provide an illumination optical device and a projection exposure device capable of reducing light quantity loss when illuminating a mask such as a reticle with illumination light in a prescribed polarization state.
An illumination optical device includes an illumination optical system ILS for illuminating a reticle R with illumination light IL and a projection optical system for projecting an image of a pattern of the reticle R on a wafer W. Illumination light IL emitted from an exposure light source 1 in a linear polarization state in the illumination optical system ILS passes through first and second double refraction members 12, 13 with different advance phase axis directions and illuminate the reticle R under a condition of annular illumination through such as a fly eye lens 14 after being converted to a polarization state which is substantially linear polarization in the circumferential direction with the optical axis as a center in an almost specific annular region.
JPH09184918A | 1997-07-15 | |||
JP2003035822A | 2003-02-07 | |||
JPH05283317A | 1993-10-29 | |||
JP2001274083A | 2001-10-05 | |||
JP2002289505A | 2002-10-04 | |||
JP2000114157A | 2000-04-21 | |||
JPH07183201A | 1995-07-21 | |||
JP2002231619A | 2002-08-16 | |||
JP2004103746A | 2004-04-02 | |||
JP2002520810A | 2002-07-09 | |||
JPH09184918A | 1997-07-15 | |||
JP2003035822A | 2003-02-07 | |||
JPH05283317A | 1993-10-29 | |||
JP2001274083A | 2001-10-05 | |||
JP2002289505A | 2002-10-04 | |||
JP2000114157A | 2000-04-21 | |||
JPH07183201A | 1995-07-21 | |||
JP2002231619A | 2002-08-16 | |||
JP2004103746A | 2004-04-02 | |||
JP2002520810A | 2002-07-09 |
WO2000067303A1 | 2000-11-09 | |||
WO2003003429A1 | 2003-01-09 | |||
WO2001035451A1 | 2001-05-17 | |||
WO2001023935A1 | 2001-04-05 | |||
WO2005005694A1 | 2005-01-20 | |||
WO2000067303A1 | 2000-11-09 | |||
WO2003003429A1 | 2003-01-09 | |||
WO2001035451A1 | 2001-05-17 | |||
WO2001023935A1 | 2001-04-05 | |||
WO2005005694A1 | 2005-01-20 |
Yoshiki Kuroki