To provide an illumination optical device capable of achieving, when mounted on an exposure apparatus, appropriate illumination conditions required for faithfully transferring a mask pattern having various characteristic features and illumination conditions rich in diversity concerning a light intensity distribution and polarization state of a secondary light source.
Concerning the illumination optical device for illuminating a surface to be illuminated, an illumination pupil distribution having a light intensity distribution located in a center area containing an optical axis and light intensity distributions located in a plurality of peripheral areas separated by intervals from the optical axis is formed on or near a pupil surface, and positions and sizes of the light intensity distributions located at the plurality of peripheral areas are changed independently of the light intensity distribution located in the center area.
JPH0298930 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
JPH08167567 | SCANNING EXPOSURE DEVICE |
NISHINAGA HISASHI
KUDO TAKETO
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JPH0653120A | 1994-02-25 | |||
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JP2002231619A | 2002-08-16 | |||
JPH07183201A | 1995-07-21 | |||
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JPH0590128A | 1993-04-09 | |||
JPH06118623A | 1994-04-28 | |||
JPH05226225A | 1993-09-03 | |||
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JPH07318847A | 1995-12-08 | |||
JP2005156592A | 2005-06-16 | |||
JP2006332355A | 2006-12-07 | |||
JP2005167254A | 2005-06-23 | |||
JP2003203850A | 2003-07-18 | |||
JP2003234285A | 2003-08-22 | |||
JP2003173956A | 2003-06-20 | |||
JP2003318086A | 2003-11-07 | |||
JP2003318087A | 2003-11-07 | |||
JP2003297727A | 2003-10-17 | |||
JPH0653120A | 1994-02-25 | |||
JP2003222710A | 2003-08-08 | |||
JP2002231619A | 2002-08-16 | |||
JPH07183201A | 1995-07-21 | |||
JP2000058441A | 2000-02-25 | |||
JPH0590128A | 1993-04-09 | |||
JPH06118623A | 1994-04-28 | |||
JPH05226225A | 1993-09-03 | |||
JPH11204432A | 1999-07-30 | |||
JPH07318847A | 1995-12-08 | |||
JP2005156592A | 2005-06-16 | |||
JP2006332355A | 2006-12-07 | |||
JP2005167254A | 2005-06-23 |
WO2003075076A1 | 2003-09-12 | |||
WO2003075076A1 | 2003-09-12 |
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
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