To provide a technique capable of suppressing the occurrence of flare light, and capable of adjusting an incident angle distribution on a illumination target surface with a high degree of accuracy (namely, uniformly).
An illumination optical system, which illuminates the illumination target surface with a light beam from a light source, has a plurality of adjustment units each having a reflectance distribution or transmittance distribution to adjust the incident angle distribution of the light beam which impinges on the illumination target surface. The plurality of adjustment units includes: an adjustment unit which adjusts differences between light amounts, in the direction along a first direction, of the incident angle distributions of light beams at a plurality of points on the illumination target surface and light amounts, in the direction along a second direction different from the first direction; and an adjustment unit which adjusts at least one of light amount differences, in the first direction, and light amount differences, in the second direction, of the incident angle distributions of the light beams at the plurality of points on the illumination target surface.
| JP2004247527A | 2004-09-02 | |||
| JP2003092253A | 2003-03-28 | |||
| JP2006054328A | 2006-02-23 | |||
| JPS62231924A | 1987-10-12 | |||
| JPH0922869A | 1997-01-21 | |||
| JP2002043221A | 2002-02-08 | |||
| JP2008270564A | 2008-11-06 | |||
| JP2006059834A | 2006-03-02 | |||
| JP2004247527A | 2004-09-02 | |||
| JP2003092253A | 2003-03-28 | |||
| JP2006054328A | 2006-02-23 | |||
| JPS62231924A | 1987-10-12 | |||
| JPH0922869A | 1997-01-21 | |||
| JP2002043221A | 2002-02-08 | |||
| JP2008270564A | 2008-11-06 |
| WO2008092653A2 | 2008-08-07 |
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu