Title:
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2015079815
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical system suitable for an exposure apparatus by controlling telecentricity for each light transmission part constituting light transmission means, and correcting the telecentricity in an exposure region of a light beam ejection face for each position.SOLUTION: A light transmission part constituted with a plurality of reflection members and a light pipe consisting of a linear rigid body adjusts a position and angle of at least one of the reflection members.
Inventors:
YOSHIKAWA TOMOHIRO
OSAKA NOBORU
OSAKA NOBORU
Application Number:
JP2013215196A
Publication Date:
April 23, 2015
Filing Date:
October 16, 2013
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Yukio Takanashi