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Title:
ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2009205011
Kind Code:
A
Abstract:

To provide an illumination optical system that can form an illumination area (for instance, a circular-arc shaped illumination area) having uniform illuminance while suppressing the decrease of illumination efficiency.

The illumination optical system, which is the one for illuminating a surface to be illuminated, includes: a plurality of illumination systems; an optical member which has a plurality of reflecting surfaces reflecting a luminous flux from each of the plurality of illumination systems and in which the plurality of reflecting surfaces are arranged so as to form one continuous composite illumination area by the luminous flux from each of the plurality of illumination systems on the surface to be illuminated; and a light-shielding part which is arranged between the optical member and the surface to be illuminated and partially shields the light of the composite illumination area, to form the shape of the composite illumination area.


Inventors:
KONO MICHIO
Application Number:
JP2008048825A
Publication Date:
September 10, 2009
Filing Date:
February 28, 2008
Export Citation:
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Assignee:
CANON KK
International Classes:
G02B19/00; G03F7/20; H01L21/027
Domestic Patent References:
JP2002075824A2002-03-15
JP2001194803A2001-07-19
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu