Title:
ILLUMINATION OPTICAL SYSTEM, OPTICAL INSPECTION DEVICE, AND OPTICAL MICROSCOPE
Document Type and Number:
Japanese Patent JP2019109302
Kind Code:
A
Abstract:
To provide an illumination optical system that suppresses enables optimal illumination light for a dark field illumination, as suppressing a loss of an amount of light.SOLUTION: An illumination optical system 1, which irradiates an irradiated surface W with illumination light L from a light source 2, includes: a converging optical system 3 that causes the illumination light L from the light source 2 to be converged; an aperture stop 5 that includes a light shield region 5a shielding a center part of a pupil plane of the illumination light L converged by the converging optical system 3, and a light shield region 5b transmitting an exterior peripheral part thereof, and forms annular band-like illumination light L by a light beam transmitting the light shield region 5b; a condenser optical system 6 that irradiates the annular band-like illumination light L formed by the aperture stop 5 toward the irradiated surface W; and a light beam angle control optical system 7 that is arranged in an optical path between the converging optical system 3 and the aperture stop 5, and controls a light beam angle distribution of the illumination light L so that intensity of the light beam at an angle to be incident upon the light shield region 5b, of the illumination light L converged by the converging optical system 3, is maximum.SELECTED DRAWING: Figure 1
Inventors:
KOMATSU AKIHIRO
ONISHI YOSHINORI
ONISHI YOSHINORI
Application Number:
JP2017240769A
Publication Date:
July 04, 2019
Filing Date:
December 15, 2017
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
G02B21/06; G01N21/84; G02B17/08; G02B19/00
Attorney, Agent or Firm:
Tatsuhiko Abe
Shinya Mitsuhiro
Choi
Keiji Kiuchi
Shinya Mitsuhiro
Choi
Keiji Kiuchi