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Title:
ILLUMINATION OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JPS6015621
Kind Code:
A
Abstract:

PURPOSE: To widen the area where a uniform irradiation is attained, by reflecting two beams, which are emitted from both ends of a laser resonator, on mirrors and superposing these reflected beams.

CONSTITUTION: When beams (a) and (a') emitted from both ends of a laser resonator 1 are reflected on mirrors 2 and 2' to irradiate a light receiving face 5, respective beams having Gaussian distributions overlap partially, and a wide area S is obtained as the area having a flat illuminance distribution. For the purpose of preventing interference fringes, a wavelength plate 3 is inserted in the optical path of one beam. If the light receiving face 5 is linear, a cylindrical lens 4 is arranged just before the light receiving face 5 to converge beams. In case of a gas laser 1', two beams (b) and (b') are different in intensity frequently, and therefore, beams are expanded by beams expanders 71 and 71', and a half mirror 30 is used to mix both beams with a transmitted light and a reflected light, and beams are reflected on mirrors 21 and 21' and are superposed after intensities of these beams are equalized in this manner.


Inventors:
USUI MASAYUKI
MINOURA KAZUO
BABA TAKESHI
MATSUOKA KAZUHIKO
SOMEYA ATSUSHI
Application Number:
JP1983000122343
Publication Date:
January 26, 1985
Filing Date:
July 07, 1983
Export Citation:
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Assignee:
CANON KK
International Classes:
G02B27/00; F21K99/00; F21S2/00; G02B19/00; G02B27/09; (IPC1-7): G02B27/00; F21S1/14



 
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