Title:
マイクロリソグラフィ投影露光装置用の照明光学系
Document Type and Number:
Japanese Patent JP5308638
Kind Code:
B2
Inventors:
Alexander Cole
Application Number:
JP2007184344A
Publication Date:
October 09, 2013
Filing Date:
July 13, 2007
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B5/30; G02B19/00; G03F7/20
Domestic Patent References:
| JP2000021751A | ||||
| JP2000031028A | ||||
| JP2005236088A | ||||
| JP2005093522A | ||||
| JP2003100626A | ||||
| JP2000021748A | ||||
| JP2004501384A | ||||
| JP2007287760A | ||||
| JP2005167254A | ||||
| JP9288251A |
Foreign References:
| WO2008007632A1 | ||||
| US20070146676 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda