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Title:
ILLUMINATION OPTICS FOR MICROLITHOGRAPHY
Document Type and Number:
Japanese Patent JP2014179645
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optics for microlithography.SOLUTION: The illumination optics can divide an illumination light radiation bundle 3 into a plurality of radiation sub-bundles (28 to 30) which are assigned to different illumination angles of the object field illumination. The illumination optics is configured so that at least some of the radiation sub-bundles (28 to 30) are superimposed in a superposition plane 16 which is spaced from the object plane and which is not imaged into the object plane in which superposition takes place. This superposition is such that edges 32 of the superimposed radiation sub-bundles coincide at least partially. A field intensity setting device 24 includes a plurality of adjacent individual diaphragms 27 which at least attenuate illumination light when exposed thereon. These individual diaphragms are insertable into an illumination light radiation bundle in a direction parallel to an object displacement direction y. All individual diaphragms of the field intensity setting device are insertable into the illumination light radiation bundle from one and the same side.

Inventors:
MARTIN ENDRES
RALF STUETZLE
JENS OSSMANN
Application Number:
JP2014102463A
Publication Date:
September 25, 2014
Filing Date:
May 16, 2014
Export Citation:
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Assignee:
ZEISS CARL SMT GMBH
International Classes:
H01L21/027; G02B19/00
Domestic Patent References:
JP2007287817A2007-11-01
JP2003309057A2003-10-31
JPH1039227A1998-02-13
JP2006253487A2006-09-21
JP2002319536A2002-10-31
JP2007288188A2007-11-01
JP2003178969A2003-06-27
JPH07230949A1995-08-29
JP2004128449A2004-04-22
JP2005524236A2005-08-11
JP2006191067A2006-07-20
JP2005196180A2005-07-21
JP2002110529A2002-04-12
Foreign References:
WO2005040927A22005-05-06
US20060244941A12006-11-02
US6476905B12002-11-05
Other References:
G. ZHANG: "ILLUMINATION PUPIL FILL MEASUREMENT AND ANALYSIS AND ITS APPLICATION 以下備考", PROCEEDINGS OF SPIE, vol. V5040, JPN5010015697, 2003, pages 45 - 56, ISSN: 0003237842
Attorney, Agent or Firm:
辻居 Koichi
Sadao Kumakura
Fumiaki Otsuka
Takayoshi Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo



 
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