ILLUMINATOR AND EXPOSURE SYSTEM EQUIPPED THEREWITH

Japanese Patent JP3919419

B2

PROBLEM TO BE SOLVED: To maintain the uniformity of the intensity distribution of the light from a light source on a surface to be irradiated regardless of the fluctuation of the light and, at the same time, to improve the efficiency of the light.
SOLUTION: An illuminator which illuminates the surface 16 to be irradiated by using the beam from the laser source 1 is provided with an optical element 6 for maintaining the emitting angle of the beam from the source 1 at a fixed divergent angle, and a diffracting optical element 10 which forms a desired intensity distribution of the beam on the incident plane of a multiple beam generating means 14. The optical element 10 is set up near the position where the luminous flux from the optical element 6 is condensed.

WO/2000/043995	METHOD FOR PHOTOGRAPHIC RECORDING OF AT LEAST A LINEAR AND/OR NON-LINEAR OPTICAL PROPERTY IN A STRUCTURE COMPRISING AT LEAST A PHOTOSENSITIVE MOLECULAR MATERIAL
JPS5781228	OPTICAL BEAM SCANNER
JP2010217928	METHOD AND APPARATUS FOR RECORDING ONE-STEP, FULL-COLOR, FULL-PARALLAX, HOLOGRAPHIC STEREOGRAM

Toshihiko Tsuji

JP2000093688A

May 23, 2007

March 30, 2000

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Canon Inc

G02B5/32; H01L21/027; G02B19/00; G03B27/54; G03F7/20; (IPC1-7): H01L21/027; G02B5/32; G02B19/00; G03F7/20

JP11176721A
JP4225359A
JP7263313A
JP10070070A
JP2001135560A

Keizo Nishiyama
Yuichi Uchio

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