Title:
ILLUMINATOR AND PROJECTION ALIGNER USING THE SAME
Document Type and Number:
Japanese Patent JP3814444
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To easily obtain an illumination condition suitable for forming a high-integration pattern image by using both of a diaphragm whose aperture diameter is variable and a variable power optical system and varying the illuminating condition of a surface to be irradiated.
SOLUTION: In the 1st diaphragm 3 whose aperture diameter is variable, plural diaphragms 3a whose aperture sizes are different each other are arranged in a turret state, and the size of the aperture is changed variously by selecting one of plural diaphragms. An image forming variable power optical system 4 projects the light intensity distribution of the position of the diaphragm 3a so as to vary power on the incident surface 5a of an optical integrator 5 by driving lenses 4b and 4c by a driving means 10. A 2nd variable diaphragm (b) is arranged near the emitting surface 5b of the integrator 5, and plural diaphragms 6a having different aperture shapes such as zonal illumination or fourfold illumination are arranged in the turret state. By selecting the diaphragm 6a, the shape of the aperture is changed.
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Inventors:
Kenichiro Mori
Application Number:
JP21020099A
Publication Date:
August 30, 2006
Filing Date:
July 26, 1999
Export Citation:
Assignee:
Canon Inc
International Classes:
G03B21/14; H01L21/027; G03F7/20; (IPC1-7): G03B21/14
Domestic Patent References:
| JP4225214A | ||||
| JP10284363A | ||||
| JP6216008A | ||||
| JP11176721A | ||||
| JP10270312A | ||||
| JP5055110A | ||||
| JP7130600A | ||||
| JP11271619A |
Attorney, Agent or Firm:
Yukio Takanashi
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