To improve controllability of a pupil luminance distribution formed on a lighting pupil surface.
A illuminator which forms a predetermined light intensity distribution on the lighting pupil surface (5b) based upon light from a light source portion (1) to provide Koehler lighting for an irradiated surface includes: a spatial optical modulator having a plurality of reflecting surfaces (SE1) which are arrayed in two dimensions and of which the postures can be controlled independently; and a condensing optical system (4) which condenses light given an angular distribution by passing through the plurality of reflecting surfaces of the spatial optical modulator to form the predetermined light intensity distribution on the lighting pupil surface, wherein 0.8D2/(r*)5 is satisfied, where D is the size of the reflecting surfaces, r is the radius of curvature of the reflecting surfaces, and is the wavelength of the light from the light source portion (1).
Takayuki Suga
Naomasa Shiraishi