Title:
IMAGE ALIGNMENT METHOD FOR RETICLE APPEARANCE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP3283836
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To tremendously shorten the inspection time over the entire part by shortening the time required for alignment.
SOLUTION: When the optical image acquired from a reticle 1 and the reference image for writing the reticle are going to be aligned, the inspection surface of the reticle 1 is divided to plural frames and the comparison of the optical image and the reference image is carried out by each of respective frames. The alignment to be carried out on the occasion of the comparison is carried out by referencing the offset quantity of the alignment carried out in the previous step.
Inventors:
Takahisa Naohisa
Application Number:
JP36064098A
Publication Date:
May 20, 2002
Filing Date:
December 18, 1998
Export Citation:
Assignee:
NEC
International Classes:
H01L21/027; G01N21/88; G01N21/956; G03F1/84; G06T3/00; G03F9/00; (IPC1-7): G03F1/08; H01L21/027
Domestic Patent References:
| JP3170930A | ||||
| JP4295748A | ||||
| JP5987345A | ||||
| JP6074625A | ||||
| JP61252629A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
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