Title:
像解析装置、解析装置、形状測定装置、像解析方法、測定条件決定方法、形状測定方法及びプログラム
Document Type and Number:
Japanese Patent JP7367668
Kind Code:
B2
Abstract:
A measurement condition that enables accurate shape measurement can be set easily. An image analysis device includes an image analyzer 83 configured to detect, in a case of capturing an image of light projected onto an object to be measured, an improper image for shape measurement of the object to be measured, on the basis of design information on the object to be measured, and a measurement condition, and an output unit 88 configured to output detection result information that is information based on a detection result of the image analyzer 83.
Inventors:
Sumito Nakano
Makoto Kondo
Makoto Kondo
Application Number:
JP2020503145A
Publication Date:
October 24, 2023
Filing Date:
February 27, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/25; G06T1/00; G06T7/521
Domestic Patent References:
| JP2014055815A | ||||
| JP2010256253A | ||||
| JP2014134389A | ||||
| JP8314997A | ||||
| JP2017032521A | ||||
| JP2014092491A | ||||
| JP2014106099A | ||||
| JP2014145735A | ||||
| JP2015197312A | ||||
| JP2017173063A |
Foreign References:
| WO2015025403A1 | ||||
| US20100165346 |
Attorney, Agent or Firm:
Kijuro Kawakita
Masahiro Fujita
Masahiro Fujita