PURPOSE: To enable fine images of a high resolution to be formed through radiation of light or radiations by using the (co)polymer of branching type α-olefin as a positive type image forming material.
CONSTITUTION: The polymer of methyl pentene such as 4-methyl-1-pentene or the copolymer containing preferably 5 to 30mole% of this is dissolved in a suitable solvent such as Trichlene to a condentration of about 0.5 to 2.0wt%. This solution is spin coated on a substrate, whereby the photosensitive layer 0.2 to 2μm in film thickness is formed. Next, ultraviolet rays, radiations, etc. are radiated by an image forming device and the latert image thus formed are developed by a solvent. Thereby, patterns of less than 1μm are formed and good images may be obtained even at a dose of 1/10 to 1/100 as compared to methyl methacrylate polymer.
MIYAMURA MASATAKA
MIYAMOTO SHIGENORI
FUKUI KUNISUKE
MITSUI PETROCHEMICAL IND