Title:
画像測定装置及び測定装置
Document Type and Number:
Japanese Patent JP6516453
Kind Code:
B2
Abstract:
An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface.
Inventors:
Nishio Yukoma
Shunichi Iwata
Eisuke Moriuchi
Shunichi Iwata
Eisuke Moriuchi
Application Number:
JP2014238666A
Publication Date:
May 22, 2019
Filing Date:
November 26, 2014
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/25
Domestic Patent References:
| JP2013152120A | ||||
| JP2014055813A | ||||
| JP2011128117A | ||||
| JP2008076217A | ||||
| JP11351824A | ||||
| JP2012215394A | ||||
| JP2010060494A |
Foreign References:
| US20140104413 |
Attorney, Agent or Firm:
Kisaragi International Patent Business Corporation