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Title:
IMAGE SENSER
Document Type and Number:
Japanese Patent JPS61156766
Kind Code:
A
Abstract:

PURPOSE: To improve the clearness of a picture image by a method wherein common electrodes are formed of shielding conductive film with windows on each individual electrode formed on the light incoming side.

CONSTITUTION: Individual electrodes 1 are formed by means of vacuum- evaporating and patterning Al on an insulating substrate 4 such as glass plate. Then a P-type amorphous silicon carbide film, I and N-type amorphous Si film are provided by means of high frequency glow discharge on the individual electrodes 1 to form photoelectric conversion films 2 of PIN structure. Next the films 2 are coated with Cr film by magnetron sputtering process to form common electrodes 3 with photoincoming windows 6 directly above the individual electrodes 1. In such a constitution, any dim part at the boundary between bright and dark parts coming into the middle part of photoelectric conversion parts may be shielded by the common electrodes 3 to prevent any carrier from flowing into adjoining individual electrodes 1.


Inventors:
KATO TOSHIAKI
Application Number:
JP28065484A
Publication Date:
July 16, 1986
Filing Date:
December 27, 1984
Export Citation:
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Assignee:
FUJI ELECTRIC CO LTD
International Classes:
H01L27/146; H01L31/0224; H04N1/028; H04N5/335; H04N5/355; (IPC1-7): H01L27/14; H04N1/028; H04N5/335
Attorney, Agent or Firm:
Iwao Yamaguchi



 
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