To provide a radiographic/fluoroscopic imaging apparatus in which the relationship between an X-ray camera and the required movement amount of a sample stage can be found by a simpler operation as compared with a setting operation in a conventional tracking function.
In a state that the fluoroscopic image of a sample W is displayed on the screen of a display 13, the sample stage 3 is moved to the optical axis direction of X-rays (z-direction), the substantial distance z' between the sample W and an X-ray source 1 is calculated on the basis of the ratio of the size of the fluoroscopic image of the sample W, before its movement to the size of the fluoroscopic image of the sample W after its movement; and the required movement amount Δx of the sample stage 3 can be calculated by Δx=z'tanθ by using its calculation result z'.
TATEZAWA YOSHIHIRO
JP2000333941A | 2000-12-05 |