To provide a wide-field and high-resolution imaging apparatus provided with a technique capable of performing satisfactory aberration correction over the whole visual field.
The imaging apparatus comprises; an imaging unit; an image-forming optical system which magnifies an image of a sample and guides the image to the imaging unit; and control means. The imaging unit comprises plural imaging element units for taking the image of the sample as plural small sections. Each of the imaging element units comprises: aberration correction means for correcting aberration included in the image of a small section to be imaged; and an imaging element for taking the image corrected by the aberration correction means. The control means separately controls a correction amount of the aberration correction means of each imaging element unit in accordance with the position of the small section to be imaged.
TSUJI TOSHIHIKO
Yoshiyuki Kawaguchi
Mayuko Wakuda
Koichiro Sakai
Takeshi Nakamura
Takeshi Niwa
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