Title:
IMAGING DEVICE, AND MANUFACTURING METHOD OF IMAGING DEVICE
Document Type and Number:
Japanese Patent JP2022105230
Kind Code:
A
Abstract:
To provide an imaging device capable of imaging with high image quality by suppressing the influence of dark current.SOLUTION: A disclosed imaging device 100 includes multiple pixels 10. Each of the multiple pixels 10 includes: a photoelectric converter 12 that converts incident light into signal charge; a charge storage region (n-type impurity region 67n) that stores signal charge; a first transistor (reset transistor 26) that is electrically connected to the charge storage region and includes a first gate electrode, a first source, a first drain, and a first side wall positioned at the wall side of the first gate electrode; a first plug (contact plug Cp7) connected to the first gate electrode; a first silicide layer (silicide layer 75) that is in contact with the first plug; and a first insulation layer 71 that is in contact with the first side wall and the first silicide layer.SELECTED DRAWING: Figure 3
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Inventors:
SAEKI KOSAKU
Application Number:
JP2019097102A
Publication Date:
July 13, 2022
Filing Date:
May 23, 2019
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
H01L27/146; H01L21/28; H01L21/306; H01L21/316; H01L21/318; H04N5/369; H04N5/374
Attorney, Agent or Firm:
Hiroi Arai
Teraya Eisaku
Shinichi Michizaka
Teraya Eisaku
Shinichi Michizaka