Title:
IMAGING DEVICE AND PROCESSING CONTROL SYSTEM
Document Type and Number:
Japanese Patent JP2020075351
Kind Code:
A
Abstract:
To provide an imaging device which can confirm wear condition of a blade tip, and a processing control system.SOLUTION: An imaging device, which is mounted on a work-piece processor for processing a work-piece by a rotatable blade, comprises: a first objective lens facing the work-piece; a second objective lens which faces the blade, and has an optical axis in a direction different from a direction crossing a rotation axis of the blade; a photosynthesis optical system which synthesizes light from the work-piece which passes the first objective lens and light from the blade which passes the second objective lens; and imaging means which images lights passed through the photosynthesis optical system.SELECTED DRAWING: Figure 3
Inventors:
SHIMIZU TASUKU
Application Number:
JP2019186920A
Publication Date:
May 21, 2020
Filing Date:
October 10, 2019
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B49/12; B24B27/06; G03B11/00; G03B15/00; G03B19/07; H01L21/301
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Norimasa Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Norimasa Matsuura