Title:
サンプルの平面の反射表面を検査する撮像光学検査装置及び方法
Document Type and Number:
Japanese Patent JP5472096
Kind Code:
B2
Abstract:
The invention relates to an imaging optical inspection setup for inspecting a sample (5). Said inspection setup comprises a source of light (3) illuminating a specified portion of the sample surface by non-collimated light (4) in a plane of illumination, at least one pinhole (7) arranged in a path of reflected light (4') reflected from said portion and/or in a path of transmitted light (4'') travelling through the entire thickness of the sample (5) in said sample portion, said pinhole (7) extending at least in the plane of illumination, and at least one screen and/or at least one position-sensitive detector system (8) arranged in the path of light (4', 4'') passing through said pinhole (7) and adapted to intercept said light (4', 4''), said detector system (8) being susceptible of sensing light intensity distribution along at least a line.
Inventors:
Horvat, Zoltan Giorgi
Juhas, Giorgi
Freid, Micros
Mayor, Chaba
Petrik, Peter
Juhas, Giorgi
Freid, Micros
Mayor, Chaba
Petrik, Peter
Application Number:
JP2010508914A
Publication Date:
April 16, 2014
Filing Date:
May 23, 2008
Export Citation:
Assignee:
MTA Termesets Doman Ikutako Cosponto
MTI Wigner Fijikai Kuta Cocos Pont
MTI Wigner Fijikai Kuta Cocos Pont
International Classes:
G01J4/04; G01B11/06; G01N21/21; G01N21/27
Domestic Patent References:
| JP2001061090A | ||||
| JP2005265655A | ||||
| JP6094631A | ||||
| JP1141756A |
Foreign References:
| US5991038 | ||||
| WO2006077105A1 |
Attorney, Agent or Firm:
Yuichi Yamada
Masakazu Noda
Ikeda adult
Masakazu Noda
Ikeda adult