IMAGING SYSTEM FOR CHARGED PARTICLE BEAM HAVING MIRROR CORRECTOR

Japanese Patent JP3269575

B2

PURPOSE: To enable the correction of chromatic imaging errors in a simple construction by arranging an electrostatic mirror conjugatedly to two symmetrical planes of a deflecting system, and imaging the two symmetrical planes mutually with imaging magnifying power of 1:1.
CONSTITUTION: A raster electron microscope has an electron source having a crossover plane 1, and a condenser lens 2. The condenser lens image the plane 1 along an optical axis 4. This electron is incident on a beam deflecting system 3 at an incidence plane 3a, is deflected to the direction of a mirror 5 by an angle of 90° by an external magnetic field B1 between external pole pieces 3e, and an internal magnetic field B2 between internal pole pieces 3f, and images in an intermediate image plane 7. Lens system 8a, 8b images a diagonal plane 3g of the deflecting system 3 in the electrostatic mirror 5, and the incident and exit course of an electron on the mirror 5 becomes symmetrical with respect to an optical axis 11 of mirror arm. An electron outgoes from an outgoing plane 3c of the deflecting system 3 along an optical axis 12, an intermediate image plane 6 of a lens 13 images in an intermediate image plane 9 with magnifying power of 1:1 by the lens system 8a, 8b and the mirror 5, and images in an object 16, contracted by an objective lenses 10.

Halalto rose
Ralph Degenhardt
Dirk Prix Zass

JP23552692A

March 25, 2002

September 03, 1992

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CARL-ZEISS-STIFTUNG

H01J37/12; G01Q30/06; H01J3/12; H01J37/04; H01J37/10; H01J37/153; H01J37/26; H01J37/29; (IPC1-7): H01J37/29; H01J37/12; H01J37/153

Toshio Yano (2 outside)

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