Title:
液浸リソグラフィ装置及びデバイス製造方法
Document Type and Number:
Japanese Patent JP4860681
Kind Code:
B2
Inventors:
Linders, Martinus, Hendricus, Antonius
Dondels, Soheld, Nicolas, Lambertus
Wagner, christian
Cortier, Roger, Hendricus, Magdalena
Dondels, Soheld, Nicolas, Lambertus
Wagner, christian
Cortier, Roger, Hendricus, Magdalena
Application Number:
JP2008317800A
Publication Date:
January 25, 2012
Filing Date:
December 15, 2008
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2006049644A | ||||
| JP2005183966A | ||||
| JP2007201384A | ||||
| JP2004363588A |
Foreign References:
| WO2006007111A1 | ||||
| WO1999049504A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki