Title:
IMPEDANCE ADJUSTMENT DEVICE AND IMPEDANCE ADJUSTMENT METHOD
Document Type and Number:
Japanese Patent JP2021108413
Kind Code:
A
Abstract:
To provide an impedance adjustment device and impedance adjustment method, capable of suppressing a reflection wave generated in a power source system for alternately outputting to a load first AC voltage and second AC voltage that have amplitude mutually differing from each other.SOLUTION: A high frequency power source 10 alternately outputs to a plasma generator 11 first AC voltage and second AC voltage that have amplitude mutually differing from each other. In the middle of a transmission path for the first AC voltage and the second AC voltage, an impedance adjustment device 13 is disposed. When AC voltage output by the high frequency power source 10 is switched to the first AC voltage, a micro computer 23 changes capacity of a variable capacitor circuit 21 to a first target value. When the AC voltage output by the high frequency power source 10 is switched to the second AC voltage, the micro computer 23 changes the capacity of the variable capacitor circuit 21 to a second target value.SELECTED DRAWING: Figure 1
Inventors:
MORII TATSUYA
Application Number:
JP2019238643A
Publication Date:
July 29, 2021
Filing Date:
December 27, 2019
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
H03H7/40; H01L21/3065; H05H1/46
Domestic Patent References:
| JP2017073247A | 2017-04-13 | |||
| JP2016066593A | 2016-04-28 | |||
| JP2003532986A | 2003-11-05 | |||
| JP2017069823A | 2017-04-06 | |||
| JP2018504864A | 2018-02-15 |
Foreign References:
| WO2018187292A1 | 2018-10-11 |
Attorney, Agent or Firm:
Hideno Kono
Nobuo Kono
Nobuo Kono