Title:
IMPEDANCE MATCHING BOX AND HIGH FREQUENCY POWER SUPPLY SYSTEM
Document Type and Number:
Japanese Patent JP2023049387
Kind Code:
A
Abstract:
To provide a technique to calculate an impedance change (locus) in which a reflection wave by IMD is considered.SOLUTION: An impedance matching box, which performs impedance matching between the source power supply 10 side and the load side, includes: a detector unit 311 which detects traveling wave power supplied from the source power supply 10 and reflection wave power from the load, so as to output a traveling wave voltage, which is a component of the traveling wave power, and a reflection wave voltage which is a component of the reflection wave power; an impedance information output unit 312 which calculates impedance from the traveling wave voltage and the reflection wave voltage; and a matching unit 313 which performs matching calculation based on the impedance value supplied from the impedance information output unit 312. The impedance information output unit 312 calculates the impedance value by complexing the traveling wave voltage and the reflection wave voltage, respectively, to generate the impedance locus using the impedance value.SELECTED DRAWING: Figure 2
Inventors:
HASEGAWA YUICHI
UENO TAKEYA
UENO TAKEYA
Application Number:
JP2021159088A
Publication Date:
April 10, 2023
Filing Date:
September 29, 2021
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
H05H1/46; H03H7/40
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office
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