IMPEDANCE-MATCHING DEVICE AND VARIABLE INDUCTOR

Title:

IMPEDANCE-MATCHING DEVICE AND VARIABLE INDUCTOR

Document Type and Number:

Japanese Patent JP2002190414

Kind Code:

A

Abstract:

To provide a high-efficiency impedance matching device.

This impedance matching device 200 is provided with a high- efficiency high-frequency (RF) impedance-matching circuit network 102. The network 102 includes an L-type inductor-capacitor (LC) circuits 110 and 116. The capacitor 110 is a variable capacitor, coupled with a grounding cable 126 via an input port 128. The inductor 116 is a variable inductance inductor coupled with an output port 132 via the input port 128. A blocking capacitor 120 is provided between the inductor 116 and an output port 132. A ceramic capacitor 112 is coupled, in parallel with the variable capacitor 110. Impedance matching is adjusted by physically adjusting adjusting elements 236 and 212 of the inductor 116 and of the capacitor 110.

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Inventors:

METT RICHARD R
GREENWAY ROBERT D
BILEK GABRIEL
JOSHI AJEY

Application Number:

JP2001305712A

Publication Date:

July 05, 2002

Filing Date:

January 13, 1998

Export Citation:

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Assignee:

APPLIED MATERIALS INC

International Classes:

H01F21/04; H01F21/10; H03H7/38; (IPC1-7): H01F21/04; H03H7/38

Attorney, Agent or Firm:

Yoshiki Hasegawa (3 outside)

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