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Title:
IMPRINT APPARATUS AND IMPRINTING METHOD
Document Type and Number:
Japanese Patent JP2011005765
Kind Code:
A
Abstract:

To provide an imprint apparatus and imprinting method efficiently and simply performing various tests for transferring of a fine irregular structure, and small amount production of various products, without damaging the fine irregular structure transferred to the surface of a base material film and the fine irregular structure on the surface of a mold.

The imprint apparatus 10 transfers the fine irregular structure formed on the surface of the mold 30 onto the surface of the long base material film 12, and has: a base material film moving means 20; the mold 30; a pressurizing means 40 pressing the base material film 12 onto the surface of the mold 30; a stripping roll 50; a stripping member elevating means elevating the stripping roll 50 in the upstream of the moving direction of the base material film 12 from the mold 30; and a stripping member horizontally moving means roughly horizontally moving the stripping roll 50 in a position higher than the mold 30.


Inventors:
NAKAI YUSUKE
NAKAMURA MASA
OKAMOTO HIDEKO
FUJIWARA TADAYUKI
Application Number:
JP2009152264A
Publication Date:
January 13, 2011
Filing Date:
June 26, 2009
Export Citation:
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Assignee:
MITSUBISHI RAYON CO
International Classes:
B29C59/02; B29C43/06; H01L21/027
Domestic Patent References:
JP2008238578A2008-10-09
JP2007176039A2007-07-12
JP2008105407A2008-05-08
JP2002347111A2002-12-04
JP2001068394A2001-03-16
JP2006245279A2006-09-14
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama